A comprehensive TCAD-based study of phosphorus diffusion and ion implantation in silicon using Silvaco ATHENA.
-
Updated
Feb 21, 2026 - MATLAB
A comprehensive TCAD-based study of phosphorus diffusion and ion implantation in silicon using Silvaco ATHENA.
Semiconductor Process Control (ECE6455-A) @ Georgia Institute of Technology, Atlanta, GA, USA
Add a description, image, and links to the semiconductor-process-control topic page so that developers can more easily learn about it.
To associate your repository with the semiconductor-process-control topic, visit your repo's landing page and select "manage topics."